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Welcome to Micro/Nanoelectronics and Energy Laboratory (MNEL)!

(1) Software licenses

COMSOL Multiphysics

Advanced Design System (ADS)

Silvaco (Athena and Atlas)


Solidworks, Matlab, LEdit ……

(2) Class 100 clean room for device fabrication (4-inch wafer fab)

Bay 1: diffusion furnace, oxidation furnace, chemical hoods, PECVD, RIE, RTP, SRD

Bay 2: mask aligner, spinner, hotplates, O2 plasma, chemical hood, Nikon microscope, ALD

Bay 3: ebeam evaporator, RF/DC sputter, ellipsometer, optical surface profiler, stylus surface profiler, AFM, Nikon microscope

(3) Instruments for electronic devices testing and MEMS/NEMS characterization

  • Signatone probe station with thermal chuck (up to 300°C)
  • Agilent B1500 semiconductor device analyzer
  • Keithley 4200 semiconductor characterization system
  • Polytec vibrometer (up to 100MHz) with vacuum chamber (1×10-6 torr)
  • Nano-manipulator and displacement-force measurement system
  • SRS high voltage power supply (10kV/1mA, 20kV/0.5mA)
  • Semiconsoft Mprobe thin film measurement system (thickness: 1nm~1mm, optical constants)
  • Rigol spectrum analyzer (9kHz~3.2GHz), signal generator (~3GHz)
  • Fluorescence microscope
  • Programmable power supply, digital multi-meter, digital oscilloscope, arbitrary function generator, …..