Welcome to Micro/Nanoelectronics and Energy Laboratory (MNEL)!
Advanced Design System (ADS)
Silvaco (Athena and Atlas)
Solidworks, Matlab, LEdit ……
- Signatone probe station with thermal chuck (up to 300°C), DC and RF (GSG) probes
- Agilent N5230C PNA-L network analyzer (300 kHz to 20 GHz)
- Rigol spectrum analyzer (9kHz~3.2GHz), signal generator (~3GHz)
- SRS high voltage power supply (10kV/1mA, 20kV/0.5mA)
- Agilent B1500 semiconductor device analyzer
- Keithley 4200 semiconductor characterization system
- Polytec vibrometer (up to 100MHz) with vacuum chamber (1×10-6 torr)
- Nano-manipulator and displacement-force measurement system
- Semiconsoft Mprobe thin film measurement system (thickness: 1nm~1mm, optical constants)
- Fluorescence microscope
- Programmable power supply, digital multi-meter, digital oscilloscope, arbitrary function generator, …..