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Welcome to Micro/Nanoelectronics and Energy Laboratory (MNEL)!

(1) Software licenses

COMSOL Multiphysics

Advanced Design System (ADS)

Silvaco (Athena and Atlas)

ANSYS/ANSYS HFSS

Solidworks, Matlab, LEdit ……

(2) Class 100 clean room for device fabrication (4-inch wafer fab)

Bay 1: diffusion furnace, oxidation furnace, chemical hoods, PECVD, RIE, RTP, SRD

Bay 2: mask aligner, spinner, hotplates, O2 plasma, chemical hood, Nikon microscope, ALD

Bay 3: ebeam evaporator, RF/DC sputter, ellipsometer, optical surface profiler, stylus surface profiler, AFM, Nikon microscope

(3) Instruments for electronic devices testing and MEMS/NEMS characterization

  • Signatone probe station with thermal chuck (up to 300°C)
  • Agilent B1500 semiconductor device analyzer
  • Keithley 4200 semiconductor characterization system
  • Polytec vibrometer (up to 100MHz) with vacuum chamber (1×10-6 torr)
  • Nano-manipulator and displacement-force measurement system
  • SRS high voltage power supply (10kV/1mA, 20kV/0.5mA)
  • Semiconsoft Mprobe thin film measurement system (thickness: 1nm~1mm, optical constants)
  • Rigol spectrum analyzer (9kHz~3.2GHz), signal generator (~3GHz)
  • Fluorescence microscope
  • Programmable power supply, digital multi-meter, digital oscilloscope, arbitrary function generator, …..