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JEOL JSM-IT800HL

Scanning Electron Microscope

The JEOL IT800 is a Field Emission SEM with a Hybrid Lens which allows imaging of nonconductive or magnetic samples, without the need for a conductive coating, as well as high depth of focus imaging. Beam Deceleration mode improves signal to noise and resolution with accelerating voltage as low as 10 V. The IT800 also comes with a sample transfer cell to transfer sensitive samples between the SEM and a glovebox without exposing to atmosphere.

Basic specification:

  • Magnification range: 10 – 2,000,000 X
  • Acceleration voltage: 0.01 to 30 kV
  • Probe current: ~1 pA to 300 nA
  • Secondary electron imaging resolution:
    • 7 nm at 20 kV
    • 3 nm at 1 kV
  • BSE resolution:
    • 5 nm at 30 kV

The IT800 is equipped with a number of different detectors:

  • Secondary (SE) and backscatter (BSE) detectors, including upper electron detector (UED) for improved topological and compositional contrast
  • Transmission Electron Detector (TED) allows bright field transmission imaging on standard 3mm TEM grids
  • Energy Dispersive Spectroscopy (EDS) – EDAX Octane Elect Super, 70mm2 detector with Si3N4 window, 127 eV resolution, detection range from Al L (73 eV) to Am, >500k counts/sec
  • Electron Backscatter Diffraction (EBSD) – EDAX Velocity Pro, up to 2000 points/sec, orientation precision < 0.1°
  • Cathodoluminescence (CL) – Deben Centaurus, panchromatic scintillator BSE/CL detector, detection range 400-1200 nm